A computer-aided spectroscopic system by use of an image processing method has been developed in order to diagnose various processing plasma. This sytem is composed of a monochromator, two image intensifiers, a CCD camera and a computer. This is characterised by the employment of a digital signal processor and spatial filtering treatment of image data for fast image operations. The validity and the significance of this system have been confirmed by the results of the spatiotemporally resolved optical emission diagnostics of plasmas in H2.
The time-resolved spectra have been obtained clearly and the time variation of the profles has been explained from the viewpoint of the self-bias voltage in plasmas.
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