画像分光計測によるレーザアブレーションプルーム挙動の測定

抄録

In order to investigate the behavior of species in the laser-ablation plume during the pulsed-laser deposition (PLD) process, the time-resolved two-dimensional laser-induced fluorescence spectroscopy (2D-LIF) and Rayleigh-Mie scattering (2D-RMS) systems have been developed. Results on the PLD process of hightemperature superconducting thin films of YBa₂Cu₃O_7-xare presented. Firstly, the effects of Doppler and collisional quenching on the sensitivity of 2D-LIF are examined. Then the spatial distributions of Cu atoms observed by the techniques as well as emissive particles in the laser ablation process of YBCO are presented. The effect of the heated substrate on the propagation process of plume was observed for the first time. 2D-RMS was utilized to visualize the behaviors of particles directly ejected from the target and of the particles condensed in the gas phase.