Abstract
FDTD simulations of electromagnetic waves in wave guide mode (or hybrid surface wave mode) discharges have been done. The results show that Transverse Magnetic waves travel along the axis of the dielectric window and penetrate into an over dense plasma as evanescent waves, which would excite electron plasma waves resonantly at the cutoff density and be efficiently absorbed. It has been also shown numerically that there is the maximum absorption energy between relative permittivity 3.6 and 4.6 at the dielectric thickness 15 mm and the diameter 132mmφ. The experiments to imitate it have indicated that there is the maximum density between relative permittivity 3.6 and 4.6.