Development of Compact 1 kg/h Coplanar Discharge Ozonizer

Abstract

A compact coplanar discharge ozonizer, of which electrodes were set on stacked and water-cooled aluminum die-cast plates, was developed. We obtained 1 kg/h ozone gas production and over 300 g/Nm³ (20wt%) saturation concentration of ozone at the pressure of 0.17 MPa. The efficiency was 100g/kWh at 180g/Nm³ when 93% oxygen contents (PSA gas) were used. Moreover, we clarified the effects of gas pressure, feed oxygen gas concentration and gas gap on the ozonizer.