抄録
Surface modification of austenitic stainless steel by plasma-based ion implantation at elevated temperatures below 450 °C has been studied experimentally. The nitrogen depth profile at room temperature was similar to that obtained by TRIM code simulation, but the depth of nitrogen penetration increases with target temperature and reaches to a few µm at the treatment condition of 450 °C and the implantation time of 2 h. High-dose nitrogen implantation more than 1018 cm-2 at the temperature above 350 °C results in the formation of expanded austenite phase (supersaturated f. c. c. phase) with little CrN precipitation, leading to remarkable enhancement of surface hardness without loss of corrosion resistance.
