抄録
The pulsed electro-acoustic (PEA) method has been widely used to observe space charge phenomena in dielectric materials. There have been awaited demands for monitoring space charge phenomena under electron beam or radioactive rays irradiations, or during plasma processing. Therefore we have developed a new PEA space charge measurement system that can observe space charge distributions under such severe conditions. This system uses an open upper electrode that can measure surface and internal space charge profiles at the same time. This paper introduces the 'Open-PEA system' with experimental results obtained during electron irradiation in vacuum.
