IEEJ Transactions on Fundamentals and Materials
Online ISSN : 1347-5533
Print ISSN : 0385-4205
ISSN-L : 0385-4205
Special Issue Review
Leading-Edge Technology and Trend in Light Application and Visual Science
Hiroyuki KameiHiromichi HorinakaToshiyuki HoriuchiToshiyuki Matsunaka
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2010 Volume 130 Issue 1 Pages 29-32

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Abstract

The technical committee on light application and visual science (TC-LAV) have been surveying fields of application of optical engineering and visual science; covering medical science, devices for visual information processing, light sources from teraherz wave to extreme ultraviolet, advanced lithography, and etc. This article introduces two topics from recent research activities. The first is an interesting challenge of bio-medical application of light, optically assisted ultrasonic velocity-change imaging applied to monitoring the distribution of gold nano particles for drug delivery system. The second is double patterning processes using the ArF immersion lithography.

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© 2010 by the Institute of Electrical Engineers of Japan
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