抄録
Employing an inductive energy storage system, a stable and high-repetitive sub-microsecond pulse generator is developed for generation of micro-plasma jets. Its operation is based on the current interruption by an SI Thyristor, coupled with MOSFETs connected in series. While being operated without loads, the pulse generator can reliably generate high-voltage pulses of ∼20 kV with pulse duration of about 400 ns at the repetition rate up to 10 kHz. At the operating frequency of 1 kHz, a maximal energy transfer efficiency of ∼57 % has been obtained with 3 kΩ resistor as a dummy load. Driven by this pulse generator, a 6 mm long N2 plasma plume at atmospheric pressure was successfully produced.
