特集解説
旧くて新しい非平衡プラズマ分光計測の新展開
—大気圧アルゴンプラズマと減圧窒素プラズマ—
2011 年 131 巻 1 号 p. 6-10
詳細
2011 年 131 巻 1 号 p. 6-10
Recent trends of optical emission spectroscopic measurement of atmospheric pressure plasmas are reviewed for the determination of electron temperature and density. Some methods to estimate the electron temperature and density are reviewed, based upon the quantitative description of the excitation kinetics in the non-equilibrium plasmas. Line intensity measurement methods are reviewed for atmospheric-pressure Ar plasma and low-pressure N2 plasma.
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