電気学会論文誌A(基礎・材料・共通部門誌)
Online ISSN : 1347-5533
Print ISSN : 0385-4205
ISSN-L : 0385-4205
論文
マイクロ波を利用した微細電子回路上の金属加熱技術の開発
三枝 幹雄孫 勝国武川 哲也菅原 修平
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2011 年 131 巻 8 号 p. 665-670

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The microwave heating system using evanescent wave for soldering fine circuits had been proposed. The evanescent wave is useful for the microwave heating very locally. The heating system consists of a matching circuit and a resonator for enhancing the magnetic field around the mouth of a circular waveguide in which the strong evanescent waves are excited. The experiments of heating lead-free solders have been done with the microwave at a frequency of 2.3-2.35 GHz and a power of about 200 W. The lead-free solder can be heated locally to be melted with microwave without any breakdown in the resonator.
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© 電気学会 2011
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