カーボンナノ材料の創製のためのプラズマプロセシング

—ナノ構造の合成およびそのプロセス制御のためのモデリング手法—

抄録

Plasma is a useful tool to synthesize carbon nano-materials including diamond, fullerene, nanotube and graphene. This review introduces the overview of these carbon nano-materials produced by thermal or non-thermal plasmas and also the authors' work related to plasma-enhanced chemical vapor deposition of carbon nanotubes and its correlation with numerical simulation of CH₄/H₂ feedstock gas plasmas. The amount of carbon atoms in the CNTs grown and that calculated from simulation showed good agreement.