Hydrophilic treatment of polyimide has been investigated using Ar-O2 mixture gas surface wave plasma apparatus. As results, sufficient hydrophilic treatment has been observed in the position well away from a dielectric plate for surface wave plasma generation. Spatial distribution of electron temperature and electron density showed the rapid decrease with increasing distance from the dielectric plate. However, catalytic probe measurement of atomic oxygen radical density showed the high oxygen radical density in the position well away from the dielectric plate. Hydrophilic treatment experiment was conducted at different two positions by adjusting treatment time to accomplish same oxygen radical amount reaching. Water contact angle of these two treated sample showed good agreement. Important contribution of the atomic oxygen radical in the downstream region of surface wave plasma had been shown through the hydrophilic processing experiment of polyimide.
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