The influence of the gas pressure on the dielectric barrier discharge with plate electrode was investigated for generating high density Ozone gas. It was impossible for discharge type Ozone gas generator to make ultrahigh density Ozone gas upto 26wt% because of Ozone decomposion by electron impacts. To make ultrahigh density Ozone gas, Ozone gas was condensated on the silicagel in the cooled adsorption column. It was possible to generate 80∼100wt% Ozone gas continuously switching two adsorption column.
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