近磁界プローブのTDR応答に基づくESD過渡磁界の波形補正法と検証

抄録

Transient magnetic fields due to collision electrostatic discharges (ESDs) between charged spherical electrodes having a diameter of 30 mm at a charging voltage from 600 V are measured in the time domain with a magnetic near-field probe. A waveform correction method based on the response of time domain reflectometry (TDR) to the magnetic field probe is proposed. The method is validated by a comparison with a theoretical waveform of the magnetic far-field derived from a dipole model consisting of image charges of the spherical electrodes just before the ESD happens.