Macro Modeling of High Frequency Dielectric Barrier Discharge

Abstract

We have developed a macro model that focuses only on electrical characteristics to handle the discharge phenomenon as a circuit. We considered the discharge as a kind of non-equilibrium system and modeled the transient changes in the discharge impedance. We also examined how to fix these model parameters from measurable values. We applied it to the high frequency dielectric barrier discharge and obtain sufficient agreement with the measurement results. We think that this model can be applied, not only to discharge phenomena but also as a method for circuit-modeling a general physical phenomenon in which the state changes transiently in a non-equilibrium system.