直熱形フィラメントによる2電子温度放電プラズマ

抄録

This paper presents the experimental verification on two-temperature electron discharge plasma in a bucket type plasma device. As long filaments (30cm) are used, there is some point at one side on filaments where the plasma potential V_sp is equal to the filament potential φF. The cold electrons are emitted from the points. At the other side on the filaments, the primary electrons accelerated by V_sp-φF ionize the gas atoms. The hot electrons are produced. The density ratio N(=N_eh/N_ec) can be controlled in a wide range of 2.5-17 by both fillament current and discharge current. The condition for the two-temperature electron discharge plasma is obtained in the present device: V<V_sp<V-V_F and V_sp-V>ionization voltage (V: the discharge voltage, V_F: the filament voltage).