窒素グロー放電陽光柱を用いた分光診断法の校正と評価

抄録

Both theoretical and experimental analyses of the radiation rates of photon from neutral and ionized molecules were required for estimating electron mean energy, electric field strength and electron density in a plasma through a spectroscopic diagnostics. A modified method for calculating the radiation rate of photon from N₂ molecules was developed based on Nishijima's model. The radiation rate was experimentally estimated using the measured radiation intensity together with the information of electric field strength and the electron density distribution. The calibration of the specrtoscopic diagnostics was realized by comparing the theoretical and experimental results obtained from the two methods.
The spectroscopic measurements of the radiation from the second positive system and the first positive system in N₂ spectra and the first negative system in N₂⁺ spectra were made in the positive column appearing in DC glow discharge under the conditions of 0.2-1.5 Torr in pressure and -3 mA in current. Electric field was measured by using a probe technique and the distribution of electron density was theoretically estimated by using modified positive column theory. In the proposed theory, the concept was based on Allis's theory and the swarm parameters derived from analyzing the Boltzman equation was effectively used. The theoretical value of electric field strength and electron density agree well with the experimental value measured by the probe and spectroscopic technique. From the fact, the validity of the theory was confirmed.