電子ビーム入射X線源におけるX線放射特性とターゲットの設計

抄録

X-ray radiation: bremsstrahlung and characteristic X-ray, in electron beam bombarded X-ray source is numerically analyzed with the Monte Carlo technique. In order to calculate the radiation, scattering processes such as bremsstrahlung, plasmon scattering, elastic collision, inner shell ionization, and secondary electron emmission are taken into account.
The calculated relation between X-ray intensity and electron energy agrees with the experimental results reported by other groups. The intensity of bremsstrahlung has strong dependence on the angle because of absorption. The thickness of a foil target in which the X-ray intensity is maximized is smaller than electron mean range. Back scattered X-ray intensity in conventional X-ray tubes varies as the target angle. The peak of X-ray intensity angular dependence is obtained when the angle is 20°-40°.