電気学会論文誌A(基礎・材料・共通部門誌)
Online ISSN : 1347-5533
Print ISSN : 0385-4205
ISSN-L : 0385-4205
超高速ガス流放電励起XeClエキシマレーザの流体特性
今田 剛升方 勝己増田 渉八井 浄
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ジャーナル フリー

1993 年 113 巻 10 号 p. 687-695

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A high-speed wind tunnel, by use of a Ludwieg tube, has been successfully developed for a highly-repetitive discharge-pumped excimer laser, the characteristics of which have been evaluated. This apparatus allows the gas flow of velocity -200m/s and pressure -294kPa. As a result of the expansion cooling, the temperature of the gas is lowered to -254K from the incident room temperature. The excimer laser flow has been simulated by solving the unsteady two-dimensional Euler equations, and aerodynamic effects of the highly-repetitive pulse discharge are investigated. A large density perturbation appears in the main discharge region when the main discharge occurs and/or the gas heated by the upstream preionization discharge arrives at the main discharge region. The high-speed gas flow sweeps the main part of the density perturbation caused by the main discharge during the successive discharge pulses. The temperature dependence of the XeCl-lasing characteristics under the expansion cooling is also simulated. The simulation has indicated the enhancement of the laser output in the lower temperature.
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