ポリイミド上のCoZrTaNb系アモルファス薄膜による磁心の特性

抄録

Co-Zr-Ta-Nb amorphous films with thickness 1-3μm were fabricated on polyimide sheets. Thermal changes of the corecive forces and the uniaxial anisotropy field were investigated in order to obtain the optimum annealing conditions for improvement of the magnetic softness. The films were found to exhibit good magnetic softness comparable to those on glass substrates. Based on those results the sheets were wound on an alumina bobbin and after annealing in a D. C. or a rotating field, initial permeability (μi), hysteresis loss (Wh), core loss (Wc), eddy-current loss (We), effective permeability (μe) and corecive force (Hc) were measured. A core with film thickness of 3μm exhibited core loss less than that of supermalloy cores (thickness 5μm) for Bm=0.1T. Effects of annealing and change of the film thickness on μi, Wh, Wc, We, μe and Hc are discussed.