電気学会論文誌A(基礎・材料・共通部門誌)
Online ISSN : 1347-5533
Print ISSN : 0385-4205
ISSN-L : 0385-4205
アルミナ高周波窓の絶縁破壊現象とその抑止
斉藤 芳男穴見 昌三道園 真一郎松田 七美男金原 粲小林 信一
著者情報
ジャーナル フリー

1994 年 114 巻 2 号 p. 100-107

詳細
抄録
Breakdown phenomena in alumina windows for high-power rf use is studied. A multipactor due to high yields of secondary electron emission causes F-center oxygen vacancies of alumina, which induces surface melting. High-purity alumina without micro-porosities or pre-existing F-centers are durable under high-power rf operation. TiN coatings can effecitively suppress the multipactor, when the thickness is optimized so as to reduce secondary electrons and to avoid any excessive heating due to rf loss. The surface discharge observed on the TiN coated surface during higher power operation indicates the electron-trapping in surface defects and the electron avalanche accompanied by luminescence.
著者関連情報
© 電気学会
前の記事 次の記事
feedback
Top