KrFエキシマガスにおける放電開始特性の定量化

抄録

The analysis of the breakdown characteristics in KrF excimer gas with a charge transfer circuit is made. We calculate the breakdown characteristics assuming a zero-dimensional uniform plasma in the prebreakdown region. And we measured them in the range of 0.3-6.0% Kr, 0.1-0.25% F₂ and 0.24-0.36MPa total pressure.
The measured and calculated breakdown characteristics are in a good agreement, then we explain principal factors controlling the breakdown. The results are as follows, (1) the electron multiplication process in the prebreakdown region is mainly controlled by the direct ionization of Kr and dissociative attachment of F₂, (2) the breakdown voltage has a minimum value with the variation of Kr partial pressure, and this characteristic corresponds to the variation of the ionization collision frequency, (3) the breakdown voltage increases with F₂ partial pressure, and this is caused by the reduction of the electron multiplication due to the dissociative attachment, (4) the breakdown voltage increases with the total pressure, and this is caused by the reduction of the electron multiplication due to the decrease of the reduced electric field E/N.