ポリイミドLB膜MIMの発生電圧温度特性

抄録

MIM samples of Al/Polyimide LB Film/Au are prepared and DC voltage of several hundreds milivolts generated in the MIM samples is analyzed in the temperature range of about 30-70°C. It is indicated that the voltage generation is due to the difference of work functions between Al and Au, and the diffusion of carriers in LB film. The diffusion constant and the diffusion current of the carriers are calculated analytically. Furthermore, the conduction current due to generated voltage is analyzed. Using the diffusion current and conduction current mentioned above, DC voltage generated in the MIM samples can be analyzed in the cases of inserting the resistances 10⁸, 10⁹, 10¹⁰ and 10¹¹Ω in the outer circuit of the MIM, and the results of the analys coincides with the results of measurements of the voltage. There is no temperature dependence of the conduction current of the MIM sample, because polyimide film is very thin (about 30Å) and the thickness of the insulating layer is about 60Å (addition of thickness of Al₂O₃ natural oxide film of about 30Å).