抄録
Under the condition of high E/n, it is expected that electrons and ions gain very high energy. These charged particles with high energy may be utilized for processing of solid surfaces. Some analyses have been carried out to know energy distribution in discharges under high E/n condition. The authors have been calculated energy distributions of electrons and ions using the Monte Carlo method. Self-consistency was satisfied on calculated results till now. However, details on mechanisms to sustain discharges at the condition were not discussed. In this investigation, the electrode effect such as γi using the Δt method was analyzed and discussed. First, contribution of reflected electrons at the anode surface on electron multiplication process was calculated. Second, secondary electron emission coefficient γi at the cathode was evaluated and reasonable magnitudes were obtained on parameter at the anode. It is suggested from these results that reflected electrons at the anode give much influence on maintaining the steady state discharge at high E/n condition.
