抄録
We have developed an inner coating system by using transported coaxial ECR plasmas. The ECR plasmas generated inside a coaxial tube were transported along the tube axis by controlling applied magnetic field. The ECR plasma was generated nearby the resonance points aspressure was decreased. It was found that the control of plasma position was possible at pressures below 1 mTorr. Increases of the electron density and the deposition rate were achieved by generating mirror magnetic field.
