スピニングローター真空計の温度による誤差の解析

抄録

This paper deals with an analysis on the offset pressure change of a Spinning Rotor Gauge (S R G), which caused from thermal change in a stainless steel rotor in starting operation and in real measurements. This analysis method is recognized to have practicability and validity in this analysis that were usefully applied to select the physical characteristics of the rotor such as density, specific heat, linnear expansion coefficient and emissivity. Then, it begins to investigate to these measured physical characteristics of rotate materials that involved liquids with measuring method of containerless treatments. Then, it continues to investigate another factor of offset pressure that especially, occurs in the effect of eddy current damping.