抄録
The detecting device and the reflection characteristics of the inspected object play an important part in automatic inspection systems. The relations among the detecting lens, the surface roughness, and the reflectances of the inspected object in automatic inspection system are studied by means of Monte Carlo (MC) method in this paper. The automatic inspection system of IC production is taken as the simulation model. Theoretical analysis and simulation results reveal as follows: It is available to examine the relation between the detecting device and the reflection characteristics of the inspected object in an automatic inspection system by MC simulation method. If the inspected objects have the same reflectance and surface roughness, the number of reflection photon bundles is related to the radius of the detecting lens and the shape of the inspected object. A change in specular reflectance can affect the reflection photon bundles much more than that of diffuse reflectance. But with the increasing of the surface roughness, the photon bundles received by the lens decrease, and the influence of specular reflectance on the reflection photon bundles tends to become the same as that of diffuse reflectance.
