抄録
In general, electron energy distribution (EED) functions in weakly ionized gases are deduced by a Monte-Carlo simulation (MCS) or a. Boltzmann equation analysis (BEA) using a, set of electron collision cross section which describe the occurrence probabilities of two body collisions between electron and atom or molecule.
This paper presents the results of detailed MCS and discussions on the position depended EED in non-equilibrium regionn of steady state Townsend discharge. Calculations are carried out in Ne and Ar at 5 Torr and E/p0=10 V/cm-Torr conditions.
It is concluded that relaxation and fine structures of EED are caused by not only the inelastic collision but also the elastic collision with Ne and Ar.
