IEEJ Transactions on Fundamentals and Materials
Online ISSN : 1347-5533
Print ISSN : 0385-4205
ISSN-L : 0385-4205
Fundamental Study of the Effect of SF6 and N2 Inclusion on Ar Inductively Coupled Plasma
G. J. Cliteu, K. Suzuki, K. C. Paul, T. Sakuta
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Keywords: SF6, N2
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1999 Volume 119 Issue 4 Pages 482-489

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