抄録
The higher order sampling of electron energy distribution function in Monte Carlo simulation (MCS) using Legendre polynomial and B-spline, called Legendre Polynomial Weighed Sampling (LPWS) developed by Ventzek and Kitamori(J. Appl. Phys., vol. 75, pp. 3785-8, 1994; one dimensional), is extended into two (2D) and three(3D) dimensional LPWS in this work. The spatio-temporal variations of energy and velocity distributions of electrons are respectively obtained by 2D and 3D LPWS. It is found that energy and velocity distributions of electrons obtained here are in excellent agreement with those obtained by conventional sampling method, namely, simple counting of electrons. It is also found that the energy and velocity distributions by LPWS give detailed information of electron behaviour in relaxation process and near electrodes and good statistics with smaller number of electrons sampled and with wider size of bin than the conventional sampling method.
