抄録
An electromagnetic conveyer which can convey micro-parts in two dimensions was fabricated. The conveyer mainly comprises a pallet made of a NdFeB magnet with yokes and eight coil-diode modules consisting of planar coil arrays and rectifying diode arrays. Fabrication of the coil-diode modules consisted of the following processes steps: sputtering, photosensitive polyimide lithography, electroless-plating, electroplating and joining. The pallet can move in two dimensions on the conveyance stage made of coil-diode modules without using a special support mechanism such as linear bearings or linear guides and stop with an accuracy of within ±20μ m by using air absorption with a V-block. Positioning accuracy on the conveyance stage is 1mm of the coil pitch. The maximumum conveyable mass of 1.2g and the output thrust of 31mN were obtained at an applied current of 1.2A/5coil. The maximum conveyer speed when unloaded was 28mm/sec.
This paper describes the conveyance properties when a circular mover is used, the cuircuit construction and fabrication of a coildiode modules to realize two-dimensional conveyance.
