Abstract
This paper presents a vibration suppression control by a load acceleration feedback control scheme that takes into account the interference force between two table drive systems on a common machine stand. In the proposed control, a two-degrees-of-freedom (2DOF) controller is designed to achieve single-input two-output control, where a load acceleration control loop using the acceleration signal and a conventional motor position control loop are realized. In addition, resonant filters are used in the 2DOF controller to suppress the effects of the interference on the positioning performance. The proposed approach has been verified by experiments by using a prototype of table drive positioning device.