System Modeling and Model-Based Feedforward Compensation for Interference between Table Drive Systems

Abstract

Force interference between multiple positioning devices with arbitrary motion profiles may deteriorate positioning performance. In this study, feedforward compensation based on an interference model of table drive systems was applied to suppress the effects of interference on positioning. The interference model was experimentally identified on the basis of frequency responses by a sinusoidal sweep method.
The proposed feedforward compensation for the interference has been verified by using a prototype that consists of two table systems on a common machine stand.