Abstract
In this paper, an approach that can be adopted to analyze to compensate for driving acoustic noises during the fast positioning control of a table system is presented. In order to appropriately compensate for the acoustic noises, the noise characteristics were experimentally analyzed by measuring the machine stand vibration, and background noises were eliminated by spectral subtraction. Further, A-weighted analyses were introduced to consider the human auditory characteristics. A vibration suppression technique based on the noise analyses was applied to a prototype of a linear-motor-driven table system, and the effectiveness of the approach was verified by conducting a series of experiments.
