抄録
The authors have proposed some actuators to be able to drive multi degree of freedom with the unit(1)-(3), and dynamic analysis methods involving the 3D finite element method for resonant actuators. This paper presents a new two-degree-of-freedom (two-DOF) resonant actuator that can be driven in the direction of X and Z axes under vector control. Vector control is employed to control each drive axis independently; the field current element (id element) is used as the Z-axis thrust element and the torque current element (iq element) is used as the X-axis thrust element.
The effectiveness of the proposed two-DOF resonant actuator was confirmed by the amplitude in the direction of the X and Z axes being well controlled without there being any mutual interference.
