The vacuum arc cathode spot can be applied to pretreatment of thermal spray because it can remove oxide layer on the metal surface. However, the cathode spot affected by the oxide layer remains unclear. Few studies have examined movement of the cathode spot with the oxide layer and theoretically estimated energy density. In this paper, energy balance on current density distribution of cathode spot in vacuum arc is calculated by the 3D electromagnetic thermal fluid simulation. As a result, in the case without considering metal vapor, the ratio of heat input to the cathode increases with increasing the current. On the other hand, in the case of considering metal vapor, it decreases with increasing the current. This reason is that current density and arc temperature decrease with increasing the ratio of metal vapor. Consequently, energy balance on current density distribution of cathode spot in vacuum arc is elucidated.
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