抄録
This paper represents a review of recent microactuator technologies. The problems and potentials of scaling actuators down to microscopic scale are first discussed from two points of view. One is based on scale rules; several examples of driving forces and structures suitable for miniaturization are examined. A great potential of microactuators as communication devices is also discussed. Recent R&D activities on microactuators are reviewed. These include electromagnetic, electrostatic, piezoelectric, shape memory alloy, polymer gel, light-driven, giant magnetrostrictive, pneumatic, hydraulic, and muscle-like actuators.
