Fabrication of Multilayer Piezoelectric Actuator by Groove Cutting and Electroplating

Abstract

This paper reports a new planer fabrication method of multilayer piezoelectric actuator. In this method, three techniques, dicing, electroplating and laser assisted etching (LAE), are used for constructing the multilayer structure. Prototype actuators that have 23-120 active layers were fabricated in this method. The measured displacement was 2.5μm (23 layers) and 7.3μm (120 layers) at 100V, respectively. These values agree with the calculated values from the piezoelectric properties of the material.