IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Paper
Development of Micro-spectrum Analyzing Devices: Applications to Carbon Dioxide Sensor
Hitoshi HaraNaoki KishiHideto Iwaoka
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JOURNAL FREE ACCESS

2002 Volume 122 Issue 5 Pages 274-279

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Abstract

We have developed an infrared detector and a micro variable infrared filter for micro-spectrum analyzing devices. Two infrared detectors and the infrared filter were mounted on the identical package. A micro-spectrum analyzing device of 1cm3 volume as the two wavelength NDIR system for combining these elements with the infrared source was able to measure the concentration of carbon dioxide.

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© 2002 by the Institute of Electrical Engineers of Japan
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