マイクロ光分析デバイスの開発と二酸化炭素濃度センサへの応用

抄録

We have developed an infrared detector and a micro variable infrared filter for micro-spectrum analyzing devices. Two infrared detectors and the infrared filter were mounted on the identical package. A micro-spectrum analyzing device of 1cm³ volume as the two wavelength NDIR system for combining these elements with the infrared source was able to measure the concentration of carbon dioxide.