Temperature Sensor Around 0°C Using Surface Acoustic Wave Filter on ZnO/LiNbO<SUB>3</SUB>

IEEJ Transactions on Sensors and Micromachines

Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939

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Temperature Sensor Around 0°C Using Surface Acoustic Wave Filter on ZnO/LiNbO₃

Hideki Yamamoto, Noriaki Saiga, Katsumi Nishimori

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Keywords: ZnO, SAW, filter, temperature sensor, temperature dependence

JOURNAL FREE ACCESS

2002 Volume 122 Issue 5 Pages 285-286

DOI https://doi.org/10.1541/ieejsmas.122.285

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© 2002 by the Institute of Electrical Engineers of Japan

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