Microfactory is a novel manufacturing system, which is useful for energy saving, space saving and on-site manufacturing. We have developed the experimental Microfactory system for processing and assembling. As an example of Microfactory, the system consists of processing unit, assembling unit and conveyance unit. And the size of the system is 600mm(W) × 650mm(D) × 750mm(H). In the processing unit, a gear pattern in the diameter of 600μm, is etched and deposited by electrochemical machining on a Chromium substrate. In the conveyance unit, pallet with electromagnet, is carried by planer coils in any direction on the unit. The assembling unit consists of two micro-arms, a rotational stage and some working tools, and miniature parts assembly is accomplished in accuracy of about ±20μm. The power consumption of air conditioning of the system is advantage to the conventional system.
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