Fine Pattern Fabrication on a Polymer Plate by Direct Imprint Lithography

Abstract

Fine pattern fabrication on a polymer surface is expected to realize low cost micro/miniaturized total analysis system (μ-TAS), or diffractive optical elements (DOE). Line and space patterns are fabricated on an acrylic plate and a poly L-Lactic acid plate by imprint lithography using Si/SiO₂ mold. The mold is pressed to the polymer plate beyond its glass transition temperature and released after cooling down. Fine pattern fabrication on the polymer surface is successfully demonstrated without expensive advanced lithographic tool and dry etching system. The minimum feature size of the imprinted pattern is 300nm and field size is 1 inch square. This fabrication method is expected to apply for micro/nano structures such as micro/nano channels of micro/miniaturized total analysis system or diffractive optical elements.