Micro-hole Fubrication using a Silicon-mold

Abstract

This paper deals with the new method that makes micro-holes with electrodeposition photoresist (EDPR) as a sacrificial layer. The EDPR was deposited on a silicon-mold made by ICP-RIE. Ni film was plated on a silicon-mold covered with EDPR. Etched through a gap between a silicon-mold and the Ni film, the Ni film came off from the silicon-mold. As a result, we could make Ni films that have micro hole of 20.9μm in diameter, and 56μm in depth on an experimental basis, and verified the silicon-mold that lateral faces of columns did not bare scratch marks.