抄録
The sequence of optical MEMS development is described, wherein research reached its climax in 2000, during the tumultuous crescendo of the telecommunication industry boom in USA and slowed down thereafter. However, recently in Japan, there are indications that efforts to fabricate stable high-performed devices are on-going, although not on a large-scale. The problems to be solved to facilitate the research of optical MEMS are also mentioned.
