Development of Microcalorimeter

Abstract

Microcalorimeter, developed as a micro thermal analyzer in the author's Lab., is explained. Usual thermal analyzer is generally composed of individually assembled three components of furnace for heating sample, two holders for reference and sample, and a temperature sensor such as the thermocouple. In our miniaturized thermal analyzer these three components are monolithically integrated on the membrane formed in SOI substrate. It is very compact and has quick response because of integration by MEMS technique. Fundamental characteristics of liquid samples are shown. New type and very sensitive temperature sensor of a pn diode instead of the thermocouple is also explained.