IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Volume 123, Issue 6
Displaying 1-6 of 6 articles from this issue
Review
  • Mitsuteru Kimura
    Article type: Review
    2003 Volume 123 Issue 6 Pages 173-177
    Published: 2003
    Released on J-STAGE: September 01, 2003
    JOURNAL FREE ACCESS
    Microcalorimeter, developed as a micro thermal analyzer in the author's Lab., is explained. Usual thermal analyzer is generally composed of individually assembled three components of furnace for heating sample, two holders for reference and sample, and a temperature sensor such as the thermocouple. In our miniaturized thermal analyzer these three components are monolithically integrated on the membrane formed in SOI substrate. It is very compact and has quick response because of integration by MEMS technique. Fundamental characteristics of liquid samples are shown. New type and very sensitive temperature sensor of a pn diode instead of the thermocouple is also explained.
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Paper
  • Hiroaki Aizawa, Eiji Toba, Tooru Katsumata, Shuji Komuro, Takitaro Mor ...
    Article type: Paper
    2003 Volume 123 Issue 6 Pages 178-184
    Published: 2003
    Released on J-STAGE: September 01, 2003
    JOURNAL FREE ACCESS
    Fiber-optic thermometer using photoluminescence lifetime from the spherical ruby crystal grown on the sapphire fiber has been fabricated using a new crystal growth process. Ruby sensor head with diameter from 0.5 mm to 6 mm have been grown on the sapphire fiber. We have optimized concentration of chromium (Cr3+) ion, size and shape of the ruby sensor head. From these results, red colored spherical ruby sensor head with Cr3+ concentration of 0.35 mol% was found to be the most suitable sensor head for fiber-optic temperature sensor. The temperature can be measured from 0 (C to 450 (C in the accuracy of (2 (C with rapid thermal response and good stability using this thermometer system.
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  • Yukie Nakazawa, Tomohiko Yamazaki, Wakako Tsugawa, Kazunori Ikebukuro, ...
    Article type: Paper
    2003 Volume 123 Issue 6 Pages 185-189
    Published: 2003
    Released on J-STAGE: September 01, 2003
    JOURNAL FREE ACCESS
    A thermostable mediator-type enzyme glucose sensor was constructed. The electrode was fabricated using chemically cross-linked thermostable co-factor binding glucose dehydrogenase (GDH) from thermophilic bacteria in carbon paste matrix. The electrode responded directly proportional to D-glucose concentration from 0.01 mM to 3 mM in stirred buffer containing 1 mM 1-methoxyphenazinemethosulfate as a mediator with the steady-state mode. The storage stability was examined by incubating the enzyme electrode at 50oC during the measurement. The cross-linked GDH immobilized electrode showed good storage stability. Ninety percent of its initial response was retained after incubation in buffer solution for 9 days at 50oC. The flow injection analysis (FIA) glucose sensing system was also constructed by immobilizing the cross-linked GDH and ferrocene as a mediator in the carbon paste matrix. The FIA system was able to measure 600 samples for 100 h.
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  • Keiichi Shimaoka, Jiro Sakata, Yasuichi Mitsushima
    Article type: Paper
    2003 Volume 123 Issue 6 Pages 190-196
    Published: 2003
    Released on J-STAGE: September 01, 2003
    JOURNAL FREE ACCESS
    A new full-dry processing method has been developed that includes a new sacrificial layer dry etching technique, which enables the microscopic structures used for microsensors to be released from silicon substrates with high repeatability, and a new water-repellent dry coating technique, which prevents the released structures from sticking to substrates during operation. The usefulness of this full-dry processing method from etching to coating, with respect to the length of releasable cantilevers, was evaluated by comparison with the conventional wet method. It was confirmed that the full-dry processing method permits sustainable cantilevers to be about three times longer than those released using the conventional wet method.
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  • Zhiyu Chi, Katsunori Shida
    Article type: Paper
    2003 Volume 123 Issue 6 Pages 197-202
    Published: 2003
    Released on J-STAGE: September 01, 2003
    JOURNAL FREE ACCESS
    The aim of this study is to propose a multi-functional tactile sensor with a simple structure to imitate the human hand. It is characterized by the small sensing area and the moving measurement method. A step-by-step method is used to realize the multi-functional sensing and in each step, different material characteristics are sensed. By analyzing the output of the sensor, three material properties, i.e., metal or non-metal, hard or soft, and curved or plane surface, and the environment temperature can be obtained. A detailed analysis of the step-by-step method to the sensor is made.
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  • Akihiro Ohta, Takashi Usuda, Hidetoshi Nakano
    Article type: Paper
    2003 Volume 123 Issue 6 Pages 203-208
    Published: 2003
    Released on J-STAGE: September 01, 2003
    JOURNAL FREE ACCESS
    The calibration procedures of charge amplifier (CA) on vibration acceleration standard are described. The calibration principle and fundamental calibration procedures are explained in detail. Typical commercial CAs (3 types, 4 CAs) are evaluated in terms of the frequency sensitivity gain, the long-term stability, the linearity for input charge, the linearity for gain setting and the effects of environmental conditions (temperature and humidity). The maximum discrepancy in the sensitivity gain is approximately 4 % among the tested CAs. A relative sensitivity gain difference of 1.5 % still remains when CAs of the same type are compared. It should be mentioned that a difference of 1.5 % is not negligible. Such a large difference has not been commonly observed up to the present time. Based on these experimental results, the technical guides for charge amplifier calibration are summarized.
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