Abstract
Today, there is variety of “nanotechnology” field such as semiconductor, biochemistry, material and so on. However, measurement and sensing technologies in nano-scale positioning are common technologies for establishing nanotechnology in each field. In this report, precise measurement technologies in positioning for “Desktop micro robots factory” are described. Non-contact position measurement techniques such as image tracking, optical encoder, and magnetic encoder are reviewed. By employing several measurement techniques in position measurement, it enables cm order to nm order positioning seamlessly. Some advantages of “Desktop micro robots factory” as a production system for nanotechnology are also reviewed.
