Improvement of an Active Temperature Measurement Cantilever of a Scanning Thermal Microscope

Abstract

Scanning Thermal Microscope with a thermal feedback system is capable of taking topological and quantitative temperature images simultaneously with sub-micron spatial resolution with the micro-fabricated special cantilever having thermopile, heater and thermocouple on it. Since high sensitivity of the thermopile in heat flow detection is required for accurate temperature measurement, we tried to make the cantilever more sensitive by reducing its thickness. As a result, thermal resistance of the cantilever increased one order of magnitude, and then sensitivity in temperature measurement and applicability to low thermal conductive material were improved. Moreover, temperature distribution of a wave guide optical switch including low thermal conductive polymer and metal heater was visualized quantitatively with the improved cantilever.