抄録
Recently, bio-microelectromechanical systems (Bio MEMSs) composed of a micro pump, mixer, valve, reactor, sensor, and an electric circuit on a chip, have being applied to biological or medical analyses. A microsensor mounted on a chip has been developed to measure the concentration of a one drop solution. The form of the microsensor on a chip was thin Cu electrodes of 12 mm2. The sensing function was evaluated by the concentration measurement of a solution (100nL) dropped on the microsensor, which could analyze electrolytes and amino acids. The electric resistance of the microsensor related well to the concentration of the solution. Further, the electric resistance of the sensor was related to light intensity that was irradiated to its surface. To measure the concentration of a solution, it is necessary to irradiate light of a constant intensity on the microsensor.
